MAEBL 2020 at Caltech




MAEBL is a two day event that brings together the brightest minds in electron beam lithography in North America. The first day features the MAEBL Foundations Workshop geared for novice/beginners in electron beam lithography and is highly recommended for academic researchers seeking guidance during the onset of their nano-lithographic work. Learn the fundamentals in machine agnostic tool operation, data preparation, process development, etc. Novice to advanced e-beam lithographers are invited to participate in the Foundations Workshop to learn, brush-up or help mentor others on the fundamentals of EBL. Advanced attendees are encouraged to impart personal accounts and challenges to the audience, elevating the workshop experience. At the end of the meeting beginners should be conversant in EBL and are encouraged to participate in day two: the MAEBL Core Workshop

Day Two is the Core Workshop that started it all. Be part of the conversation and learn something new (or old). Arrive early to network, receive your name badge and to grab a coffee/light continental breakfast. Bring your business cards, laptop computer with designs and SEM images of your issues and an open mind. The goal of the meeting is to connect active novice to experienced EBL tool owners and users to openly exchange practical and directly applicable EBL knowledge in an open forum format. The event features invited talks from users in the field. In the years past, attendees have networked with like minded researchers and scientists and witnessed invited talks from Argonne National Laboratory, the National Institute of Standards and Technology, IBM, Ohio State University, The Pennsylvania State University, the University of Delaware, Brookhaven National Laboratory, Caltech, Yale, the University of Pennsylvania, Sandia National Laboratory and MIT (to name a few).


Registration helps to defer food costs for the venue. To qualify to attend, you should be an active EBL tool owner/user at a recognized academic, industry, or government lab and must sign up using your institution's e-mail. On-site registration will not be available. You must sign-up online in advance. Thank you for your understanding. 

Registration will reopen once a new date is determined and the COVID-19 situation has subsided.

Refund Policy

All paid registrations will be refunded.


On-site parking is available at Caltech.

384 South Holliston Avenue, Pasadena, California 91106, United States