The Meeting for Advanced Electron Beam Lithography is ran by the Pennsylvania nonprofit MAEBL Inc. The organization was officially established June 5, 2019, by the Pennsylvania Department of State as a non-profit corporation and is recognized by United States Internal Revenue Service as a Section 501(c)(3) public charity.
The Meeting for Advanced Electron Beam Lithography (MAEBL), formerly Mid-Atlantic Electron Beam Lithography, was conceived between a group of e-beamers at the 2016 International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) in Pittsburgh, Pennsylvania. MAEBL's mission is to connect active novice to experienced electron beam lithography (EBL) tool owners and users to exchange practical and directly applicable knowledge in the field of EBL devoid of conference formality. As a small and geographically dispersed and notably vendor segmented community, the meeting provides an intimate space to allow its members to openly discuss topics devoid of conference formality and EBL hardware vendors/exhibitors.
MAEBL became a reality on April 19, 2017, at the University of Pennsylvania Singh Center for Nanotechnology with over 60 attendees who convened to discuss best practices and state-of-the-art techniques for fine feature patterning in EBL. The 2nd MAEBL was held again at the University of Pennsylvania Singh Center for Nanotechnology on April 23, 2018.
MAEBL entered its third year and was hosted and sponsored in part by The Ohio State University on Wednesday, April 3, 2019. New to 2019, MAEBL garnered financial support from Charter Sponsors JEOL USA, Raith, STS-Elionix, AllResist, DisChem, LatticeGear and GenISys. Speakers from Caltech, Yale University, The Ohio State University, MIT, Sandia National Laboratory and the University of Pennsylvania covered topics in data preparation, device fabrication, tool operation, stitching/drift management and resist processing.
On June 5, 2019, the organization was officially established as the Pennsylvania nonprofit MAEBL Inc. by the Pennsylvania Department of State and is recognized by the United States Internal Revenue Service as a Section 501(c)(3) public charity. Inaugural board members included Mrs. Aimee Bross Price (President), Dr. Kevin Lister (Vice President) and Dr. Gerald Lopez (Board Chair, Treasurer and Secretary). The appointment term for each office is for one year except for the Board Chair which is three years. Each appointment is renewable.
Its fourth meeting at Caltech on April 6-7, 2020, was cancelled in early March due to the COVID-19 pandemic. The meeting transitioned online as a series of six, 2-hour, monthly meetings to continue networking and discussion among EBL owners and users globally. The first meeting, held 3 pm - 5 pm EDT on Thursday, July 23, 2020, had 51 participants spanning 6 countries: Australia, Canada, Saudi Arabia, Switzerland, the United Kingdom, and the United States. Roughly half the participants were first time attendees. To continue the conversation between meetings, the MAEBL Slack channel was created.
The fifth meeting at the University of Pennsylvania from November 9-10, 2021, was held as a hybrid workshop leveraging MEETING OWLS and GatherTown between in-person and online attendees. Over 80 registered attendees participated in the growing community.
The sixth meeting at the California Institute garnered a record-breaking 100+ attendees spanning 9 countries and 65 organizations, which includes 39 academic institutions, 10 industry organizations and 16 government laboratories. Most hailed from the United States followed by Australia and Canada. Others represented France, India, Romania, Saudi Arabia, Switzerland, and the United Kingdom. We received an in-person invited talk by our inaugural MAEBL Travel Award Recipient, Dr. Michael Stuiber, a process engineer at the Melbourne Centre for Nanofabrication in Australia. In addition to the hybrid meeting, two MAEBLx meetings for Asia Pacific and Europe organized before and after the meeting, respectively, fostered community growth. These bonus meetings, consisting of structured talks and casual discussions, were scheduled in their respective time zone to promote regional engagement. Lastly, as part of our growth, we welcomed Dr. Allison Dove, a process engineer at the Marvell Nanofabrication Laboratory at the University of California Berkeley, to our MAEBL Board of Directors. Her ideas, experience, energy and enthusiasm have been welcomed. Unwittingly, the MAEBL Board of Directors now represent tool owners of major EBL vendors: Crestec, JEOL, RAITH and STS-Elionix.
Today, the Meeting for Advanced Electron Beam Lithography continues to be an active community of engineers, scientists and students from industry, academia, and government who use electron beam lithography (EBL) to enable cutting edge research and development. Structured talks, lectures, planned discussions and continuous active engagement bring together the collective living and knowledge of an esoteric field of nanotechnology and nanofabrication and continue to be the hallmarks of MAEBL.