Today, The Meeting for Advanced Electron Beam Lithography or MAEBL is community of engineers, scientists and students from industry, academia, and government that use electron beam lithography (EBL) to enable cutting edge research and development. Structured talks, lectures and planned discussions in addition to over three hours of networking are built into the meeting. What started as a one day agenda evolved into a series of 6 meetings for 2020.
The Meeting for Advanced Electron Beam Lithography, formerly Mid-Atlantic Electron Beam Lithography, was conceived in 2016 during the Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) conference in Pittsburgh, PA. MAEBL's mission is to connect active novice to experienced EBL tool owners and users to exchange practical and directly applicable knowledge. As a small and geographically dispersed and vendor segmented community, the meeting provides an intimate space to so its members can openly discuss topics devoid of conference formality and EBL hardware vendors/exhibitors. In its fourth year, MAEBL continues to help promote this dialogue within the segmented EBL community by holding fast to its tradition in allowing only the end-users of these state-of-the-art systems.
On April 19, 2017, over 60 registered for the first MAEBL to discuss best practices, computational efforts and the state-of-the art techniques for fine feature patterning in electron beam lithography. The 2nd MAEBL was held again at the University of Pennsylvania Singh Center for Nanotechnology on April 23, 2018. Both meetings combined, talks by The Ohio State University, the University of Pennsylvania, The Pennsylvania State University, the University of Delaware, Massachusetts Institute of Technology (MIT), Argonne National Laboratory, Brookhaven National Laboratory, IBM Research and MIT Lincoln Laboratory have been witnessed by the attendees representing Carnegie Mellon University, City University of New York, Columbia University, Cornell University, George Washington University, Georgia Institute of Technology, National Research Council of Canada, North Carolina A&T State University, Northwestern University, Princeton University, University of California San Diego, University of California Santa Barbara, The National Research Council Canada and the University of Washington.
MAEBL entered its third year at The Ohio State University on Wednesday, April 3, 2019. New to 2019, we are grateful for the support of our MAEBL Charter Sponsors: JEOL USA, Raith, STS-Elionix, AllResist, LatticeGear and GenISys. With the COVID-19 pandemic, MAEBL 2020 was moved online to continue networking and discussion among EBL owners and users globally.
