Kevin Lister, Aimee Price and Gerald Lopez (left to right) are the founding members of MAEBL. They painstakingly coordinate MAEBL from campaigning to programming to sponsorships.
The Meeting for Advanced Electron Beam Lithography (MAEBL), formerly Mid-Atlantic Electron Beam Lithography, was conceived between a group of e-beamers at the 2016 International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) in Pittsburgh, PA. MAEBL's mission is to connect active novice to experienced electron beam lithography (EBL) tool owners and users to exchange practical and directly applicable knowledge in the field of EBL devoid of conference formality. As a small and geographically dispersed and notably vendor segmented community, the meeting provides an intimate space to allow its members to openly discuss topics devoid of conference formality and EBL hardware vendors/exhibitors.
MAEBL became a reality on April 19, 2017, at the University of Pennsylvania Singh Center for Nanotechnology with over 60 attendees who convened to discuss best practices and state-of-the-art techniques for fine feature patterning in EBL. The 2nd MAEBL was held again at the University of Pennsylvania Singh Center for Nanotechnology on April 23, 2018. Both meetings combined, talks by The Ohio State University, the University of Pennsylvania, The Pennsylvania State University, the University of Delaware, Massachusetts Institute of Technology (MIT), Argonne National Laboratory, Brookhaven National Laboratory, IBM Research and MIT Lincoln Laboratory have been witnessed by the attendees representing Carnegie Mellon University, City University of New York, Columbia University, Cornell University, George Washington University, Georgia Institute of Technology, National Research Council of Canada, North Carolina A&T State University, Northwestern University, Princeton University, University of California San Diego, University of California Santa Barbara, The National Research Council Canada, Sandia National Laboratory, and the University of Washington.
MAEBL entered its third year and was hosted and sponsored in part by The Ohio State University on Wednesday, April 3, 2019. New to 2019, MAEBL garnered financial support from Charter Sponsors JEOL USA, Raith, STS-Elionix, AllResist, DisChem, LatticeGear and GenISys. Speakers from Caltech, Yale University, The Ohio State University, MIT, Sandia National Laboratory and The Ohio State University covered topics in data preparation, device fabrication, tool operation, stitching/drift management and resist processing.
On June 5, 2019, the organization was officially established as the Pennsylvania nonprofit MAEBL Inc. by the Pennsylvania Department of State and is recognized by the United States Internal Revenue Service as a Section 501(c)(3) private foundation within the meaning of Section 509(a). Active board members are Mrs. Aimee Bross Price (President), Dr. Kevin Lister (Vice President) and Dr. Gerald Lopez (Board Chair, Treasurer and Secretary). The appointment term for each office is for one year except for the Board Chair which is three years. Each appointment is renewable.
Its fourth meeting at Caltech on April 6-7, 2020, was cancelled in early March due to the COVID-19 pandemic. The meeting transitioned online as a series of six, 2-hour, monthly meetings to continue networking and discussion among EBL owners and users globally. The first meeting, held 3 pm - 5 pm EDT on Thursday, July 23, 2020, had 51 participants spanning 6 countries: Australia, Canada, Saudi Arabia, Switzerland, the United Kingdom, and the United States. Roughly half the participants were first time attendees. The meeting sponsors include JEOL USA, Raith, STS-Elionix, AllResist, DisChem, PBS&T, and GenISys. To continue the conversation between meetings, the MAEBL Slack channel was created.
Today, the Meeting for Advanced Electron Beam Lithography continues to be an active community of engineers, scientists and students from industry, academia, and government who use electron beam lithography (EBL) to enable cutting edge research and development. Structured talks, lectures, planned discussions and continuous active engagement bring together the collective living and knowledge of an esoteric field of nanotechnology and nanofabrication and continue to be the hallmarks of MAEBL.